핵심 기술
Why DLC coating ?
Diamond-Like Carbon (DLC) coating
HF-DLC coating (FCVA)
1st generation |
2nd generation |
3rd generation |
|
---|---|---|---|
Method | CVD | Sputter | Arc |
Classification | Hydrogen-containing Carbon amorphous | Non hydrogen Carbon amorphous | Non hydrogen Diamond-containing amorphous |
Ionization rate | 10% | 5-30 % | 90% |
Hardness (GPa) | < 10 | < 20 | > 30 |
Heat resistance (℃) | < 350 | < 350 | < 500 |
Why FCVA deposition?
FCVA (Filtered Cathodic Vacuum Arc) deposition
VA (Vacuum Arc)
High kinetic energy (10-30 eV) Graphite fragment (droplet)
FCVA (Filtered Cathodic V.A.)
To prevent inflow of droplet,
a magnetic field, curved duct
& filter are introduced Inflow of macro-particles were inevitable
System Scale up
Scale up _ Long Sample
Cathode Life Time
: Φ50 x 40L
1.8mm/hr. @70A
= 15 hr
Target Height loss(mm/hr) = 0.44+0.019*Current(A)
공동개발 및 기술이전
한국재료연구원 표면재료연구본부 극한환경코팅 연구실 트라이볼로지 코팅팀 Tribology Coationg Lab., Department of Extreme Environmental Coationgs Surface Materials Division,
Korea Institute of Materials Science ( )